Cr-Cu-N coatings with copper content from 0 at%to 6.8 at%were deposited on silicon and M2 steel by ion beam assisted magnetron sputtering.The microstructure and composition of the coatings were characterized using SEM,GDOES,XRD and XPS.The mechanical properties of the coatings were tested on a standard hardness tester.The tribological behavior of the coatings in dry wear condition was studied by means of ball-on-disc wear test.The experimental results show that addition of copper can restrict the columnar crystal growing to a certain degree.XRD and XPS analysis indicate that coatings are mainly composed of Cr and CrN phase.Cu is mainly existed in a free state in the coatings.Copper adding has no obvious effects on the hardness of the coatings.However,the coatings fracture toughness can be improved by doped copper.The coefficient of friction of the coatings against bearing steel is in the range of 0.25-0.6 changing with the copper content.The coating with 2.6 at%copper shows the lowest coefficient of friction about 0.25 and wear rate which is about one tenth of that of the coating with 6.8 at%copper.The higher coefficient of friction and wear rate of the coating with 6.8at%copper may be attributed to its lower bonding strength. Cr-Cu-N coatings with copper content from 0 at% to 6.8 at% were deposited on silicon and M2 steel by ion beam assisted magnetron sputtering. The microstructure and composition of the coatings were characterized by SEM, GDOES, XRD and XPS. mechanical properties of the coatings were tested on a standard hardness tester. The tribological behavior of the coatings in dry wear condition was studied by means of ball-on-disc wear test. The experimental results show that addition of copper can restrict the columnar crystal growing to a certain degree. XRD and XPS analysis indicate that coatings are mainly composed of Cr and CrN phase. Cu is primarily existed in a free state in the coatings.Copper adding has no obvious effects on the hardness of the coatings.However, the coatings fracture toughness can be improved by doped copper. The coefficient of friction of the coatings against bearing steel is in the range of 0.25-0.6 changing with the copper content. The coating with 2.6 at% copper shows the lowest coefficient of friction about 0.25 and wear rate which is about one tenth of that of the coating with 6.8 at% copper.The higher coefficient of friction and wear rate of the coating with 6.8at% copper may be attributed to its lower bonding strength.