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为了提高涡流传感器监测裂纹灵敏度,应用COMSOL软件AC/DC模块建立了涡流传感器监测系统模型,并搭建试验系统证明了其正确性;优化了涡流传感器的结构参数,基于优化结果试制了涡流传感器,并进行了预制裂纹监测试验.模型分析与试验结果表明:提离距离越小,基材厚度越薄,系统监测灵敏度越高;涡流传感器各通道通过裂纹区域时,跨阻抗幅值和相位都增大,以综合跨阻抗幅值和相位的变化率作为系统输出信号,提高了监测灵敏度,传感器分辨率达到1mm.
In order to improve the sensitivity of the eddy current sensor to monitor the crack, an eddy current sensor monitoring system model was established by using COMSOL software AC / DC module, and the test system was established to prove its correctness. The eddy current sensor structural parameters were optimized. The eddy current sensor The results of the model analysis and experimental results show that the smaller the lift-off distance is, the thinner the substrate thickness is and the higher the monitoring sensitivity of the system is. The amplitude and phase of the trans-impedance increase when each passage of the eddy current sensor passes the crack region , To comprehensive transimpedance amplitude and phase change rate as the system output signal to improve the monitoring sensitivity, the sensor resolution of 1mm.