Two-dimensional van der Waals thin film transistors as active matrix for spatially resolved pressure

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The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots,prostheses,human-machine interfaces,and artificial intelligence (AI).Here we report an integrated pressure sensor array,by combining solution-processed two-dimensional (2D) MoS2 van der Waals (vdW) thin film transistor (TFT) active matrix and conductive micropyramidal pressure-sensitive rubber (PSR) electrodes made of polydimethylsiloxane/carbon nanotube composites,to achieve spatially revolved pressure mapping with excellent contrast and low power consumption.We demonstrate a 10 × 10 active matrix by using the 2D MoS2 vdW-TFTs with high on-off ratio > 106,minimal hysteresis,and excellent device-to-device uniformity.The combination of the vdW-TFT active matrix with the highly uniform micropyramidal PSR electrodes creates an integrated pressure sensing array for spatially resolved pressure mapping.This study demonstrates that the solution-processed 2D vdW-TFTs offer a solution for active-matrix control of pressure sensor arrays,and could be extended for other active-matrix arrays of electronic or optoelectronic devices.
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