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空间光学元件对面形精度和表面质量有着极高的要求,气囊抛光采用了新型的抛光工具和特殊的运动形式,是一种高精度、高效率的光学元件加工方法,尤其适用于非球面的加工,具有广阔的应用前景。分析了气囊抛光技术的基本原理及该技术的发展过程,介绍了气囊抛光相关技术的研究情况和实验结果,对几项关键技术的研究现状进行综述,重点介绍材料去除特性、驻留时间控制算法、边缘精度控制以及最新开发的喷液抛光技术的研究情况。
Space optical components on the surface accuracy and surface quality has a very high demand, the use of a new type of polishing tool for balloon polishing and special forms of motion, is a high-precision, high efficiency optical components processing method, especially for aspheric processing ,have a broad vision of application. The basic principle of the airbag polishing technology and the development of the technology are analyzed. The research status and experimental results of the technology related to airbag polishing are introduced. The research status of several key technologies are reviewed. The material removal characteristics, dwell time control algorithm , Edge accuracy control and the latest development of liquid jet polishing technology research.