采用水相硅烷化方法 ,将3 氨基丙基 三甲氧基硅烷(APS)组装在湿化学法处理的单晶硅表面上.接触角、原子力显微镜(AFM)、X射线光电子能谱(XPS)表征结果显示得到了平整均匀的具有氨基表面的自组装膜.SEM观察表明 ,16nm的金纳米粒子可以在上述氨基表面上形成均匀的亚单层排布 ,得到具有Au纳米粒子/APS/Si形式的纳米复合结构 ,进一步的处理可以使金纳米粒子在表面上的排列由随机趋于有序化. 3-Aminopropyltrimethoxysilane (APS) was assembled on the surface of monocrystalline silicon treated by wet chemical method using aqueous silanization method.The contact angle, atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) The results showed that a uniform and uniform self-assembled film with amino surface was obtained.SEM observation showed that the 16 nm gold nanoparticles could form a uniform sub-monolayer arrangement on the above amino surface to obtain a self-assembled monolayer with Au nanoparticles / APS / Si Nanocomposite structure, further processing can make the arrangement of gold nanoparticles on the surface by random tend to order.