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用高频阴极辉光放电沉积在控制基片温度来制备氢化非晶态碳(a—C:H)膜,退火温度上升到600℃,这些膜的喇曼光谱在波区1000~1800cm~(-1)进行的,a-C:H膜的喇曼光谱是一个非对称的简单的谱带。随着退火温度的升高,a—C:H膜出现两个峰值,也观察了金刚石和天然石墨的喇曼光谱,这些光谱与现代研究的模型进行了讨论,其结果认为非晶态碳具有三次配位和四次配位原子的网状结构模型相一致。
Hydrogenated amorphous carbon (a-C: H) films were prepared by high frequency cathode glow discharge deposition at a controlled substrate temperature. The annealing temperature was raised to 600 ° C. The Raman spectra of these films ranged from 1000 to 1800 cm ~ -1), the Raman spectrum of the aC: H film is an asymmetric simple band. As the annealing temperature increases, two peaks appear in the a-C: H film, and the Raman spectra of diamond and natural graphite are also observed. These spectra are discussed with the models of modern studies and the results suggest that amorphous carbon has The three-coordinate and four-coordinated atomic network structure model is consistent.