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以飞秒脉冲激光的非平衡态传热和原子分子激发态的微观机理为基础,建立了飞秒激光对微纳米结构中基体表面层的杂质进行脱附的随机运动物理模型.由脱附过程的数值模拟结果,获得了脱附概率随激光辐射时间的演化规律以及不同激光参数对脱附概率的影响.
Based on the non-equilibrium heat transfer of femtosecond pulsed laser and the microscopic mechanism of atomic excited states, a stochastic moving physical model for the desorption of impurities in the surface layer of micro-nano structure in femtosecond laser was established. , The evolution law of the desorption probability with laser irradiation time and the influence of different laser parameters on the probability of desorption were obtained.