在科学技术飞速发展的今天 ,特别是被称为 2 1世纪核心技术的信息技术、生物技术和微纳技术的迅猛发展 ,使各学科之间正呈现出高度的相互交叉和综合。无论是微电子技术、光电子技术、纳米技术、微机电制造技术等革命性的推动 ,还是微传感器、纳米材料、生物芯片等应用性的拉动 With the rapid development of science and technology, the rapid development of information technology, biotechnology and micro-nano technology, especially known as the core technology of the 21st century, has shown that the disciplines are highly interdisciplinary and comprehensive. Whether it is the revolutionary promotion of microelectronics technology, optoelectronics technology, nanotechnology, micro-electromechanical manufacturing technology, or the like, such as micro-sensors, nanomaterials and bio-chips