论文部分内容阅读
为了将激光弯曲成形技术应用于精密位移调整领域实现亚微米精度的位移调整,自行设计和搭建了激光微位移调整与测量平台,将光纤激光通过线性透镜和扫描振镜聚焦在不锈钢薄板上作匀速扫描运动,实时监测加工过程样件自由端的输出位移。建立了样件激光微位移调整模型,在此基础上研究改变激光功率、扫描速度、光束照射位置以及离焦量等参数对调整位移的影响。结果表明,样件通过该平台实现了亚微米级重复精度的精密位移调整,改变激光照射位置是精确改变调整位移的首选;通过优化工艺参数,降低了激光加工过程中样件表面的损伤。
In order to apply the laser bending technology to the field of precise displacement adjustment to achieve the sub-micron precision displacement adjustment, a laser micro-displacement adjustment and measurement platform was designed and constructed. The fiber laser was focused on a stainless steel sheet through a linear lens and a scanning galvanometer for uniform velocity Scanning motion, real-time monitoring of the workpiece free sample output displacement. The model of laser micro-displacement adjustment was set up. Based on this, the influences of laser power, scanning speed, position of light beam and defocus amount on the adjustment of displacement were studied. The results show that the sample through the platform to achieve sub-micron precision sub-micron precision displacement adjustment, change the laser irradiation position is the first choice to accurately adjust the displacement change; by optimizing the process parameters, reducing the sample surface during laser processing damage.