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为了消除悬臂梁移动时产生的阿贝偏角误差,设计了一种可同时测量角度与位移的精密测量系统.首先,在激光干涉原理的基础上,通过改变光路将角度转换为可以反映干涉系统中光程差变化的位移量.其次,采用压电陶瓷(PZT)驱动柔性铰链机构,产生运动的干涉条纹.最后,采用四细分条纹计数辨向方法,进行运动干涉条纹的接收与处理实验,结果表明:在条纹宽度处于合适值时,系统满足了对阿贝偏角精密测量的要求.
In order to eliminate the Abbe offset error caused by the movement of cantilever beam, a precise measuring system for measuring angle and displacement is designed.Firstly, based on the principle of laser interferometry, the angle is changed by changing the optical path to reflect the interferometer system (PZT) is used to drive the flexible hinge mechanism to generate the moving interference fringes.Finally, the experiment of receiving and processing the motion interference fringes is carried out by using the method of four subdivision stripe counting and orientation The results show that the system meets the precision requirements of Abbe decoupling when the stripe width is at a proper value.