超精密进给系统是保证零件尺寸加工精度的重要因素。文中以压电陶瓷作为驱动器构建了微位移机构,讨论了系统的总体结构,研究和分析了系统模型和控制方法,通过实验计算得到前馈控制模型数据,并在此基础上对超精密进给闭环控制系统进行方案设计。最后进行了超精密进给系统在磨床上的应用及其性能测试,并对实验结果进行了分析。 Ultra-precision feed system is to ensure the accuracy of the parts size processing an important factor. In this paper, a piezoelectric actuator is used to construct a micro-displacement mechanism. The overall structure of the system is discussed. The system model and control method are studied and analyzed. The feedforward control model data are obtained through experiments. On this basis, Closed loop control system design. Finally, the application of ultraprecision feeding system on grinder and its performance test were carried out, and the experimental results were analyzed.