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采用一种新工艺制作了垂直腔面发射激光器(VCSEL),即用开环分布孔取代以往的环形沟道作为氧化物限制技术的注入窗口。因开环分布孔间形成多个桥,为电注入提供了天然的桥状通道,解决了电极过沟断线问题。这种新结构器件的输出功率约为以往结构器件的1.34倍。在20℃~80℃范围内,对器件的输出功率、阈值电流及波长漂移性进行了研究。60℃时最大输出光功率可达到6 mW。激射波长随温度升高呈线性变化,且向长波方向移动,速率为0.06 nm/℃。由实验结果计算出器件的热阻为1.96℃/mW。
Vertical cavity surface emitting lasers (VCSELs) were fabricated using a novel process that replaces the conventional annular channel with an open-loop distribution hole as an implantation window for oxide confinement techniques. Due to the formation of a plurality of bridges between the open-loop holes, a natural bridge-shaped channel is provided for the electrical injection, which solves the problem of the electrode crossing the channel breakage. The new structure of the device output power of about 1.34 times the structure of the past. In the range of 20 ℃ ~ 80 ℃, the device output power, threshold current and wavelength drift were studied. 60 ℃ maximum output optical power up to 6 mW. The lasing wavelength changes linearly with increasing temperature, and moves to the longwave direction at a rate of 0.06 nm / ° C. From the experimental results calculated thermal resistance of the device is 1.96 ℃ / mW.