利用ＭｏｎｔｅＣａｒｌｏ模型研究了薄膜生长初始阶段岛的形貌与基底温度之间的关系，同时还研究了它们与汽相粒子入射剩余能量之间的关系．模型中考虑了三种动力学过程：粒子入射、吸附粒子扩散和粒子脱附，与以前薄膜生长模型的不同之一在于把入射过程看作独立于其他过程，而扩散和脱附过程是相互关联的．结果表明随基底温度的升高，岛的形貌经历了一个从分散生长、分形生长到凝聚生长的变化过程．低温下随汽相粒子入射和剩余能量增加，岛的形貌也经历了同样的变化过程 Monte Carlo model was used to study the relationship between the morphology of the island and the substrate temperature at the initial stage of film growth. Meanwhile, the relationship between them and the incident residual energy of vapor phase particles was also studied. Three kinetic processes are considered in the model: particle entrance, adsorption particle diffusion and particle desorption. One of the differences from the previous film growth model is that the incident process is considered to be independent of other processes, and the diffusion and desorption processes are interrelated of. The results show that with the increase of substrate temperature, the morphology of island undergoes a change from dispersed growth, fractal growth to cohesive growth. With the incident of vapor phase particles and the increase of residual energy at low temperature, the morphology of the island also experienced the same change process