通过采用多级Ｌ－Ｃ峰化回路、增大输出镜反射率、改变ＨＣｌ浓度的方法，使ＸｅＣｌ准分子激光的脉冲宽度达到１５０ｎｓ以上（最大脉宽达１７５ｎｓ），单脉冲能量大于１２０ｍＪ。同时对紫外准分子激光的光纤耦合系统进行了研究，直径为０．４，０．６，０．８，１．５ｍｍ的紫外石英光纤的耦合输出能量分别为１０，２９，３９，５８ｍＪ The pulse width of XeCl excimer laser reaches more than 150ns (the maximum pulse width reaches 175ns) and the single pulse energy is more than 120mJ by adopting the multi-stage L-C peaking circuit, increasing the output mirror reflectivity and changing the HCl concentration. At the same time, the coupling system of UV excimer laser was studied. The coupling output energy of UV quartz optical fiber with diameters of 0.4, 0.6, 0.8 and 1.5 mm were 10, 29, 39 and 58 mJ