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研究了ＣＨ３ＳｉＣｌ３－Ｈ２－Ａｒ体系在常压条件下化学气相沉积ＳｉＣ的组织结构及其高温稳定性。在一定沉积温度下，沉积物的形貌由Ｈ２流量所控制；而在Ｈ２流量一定的条件下，随着沉积温度的提高，沉积物的晶粒尺寸和致密度增加。本实验所得到的沉积物均为纳米级β－ＳｉＣ，经高温热处理后发生明显的晶粒长大现象
The microstructure and high temperature stability of SiC in CH3SiCl3-H2-Ar system at atmospheric pressure were investigated. At a certain deposition temperature, the morphology of the sediments is controlled by the H2 flow rate; while with a certain H2 flow rate, the grain size and the density of the sediments increase with increasing deposition temperature. The sediments obtained in this experiment are all nano-β-SiC, and the obvious grain growth occurs after high temperature heat treatment