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针对集成光学陀螺中核心敏感单元难以同时实现集成化和高灵敏度问题,提出了硅基二氧化硅楔角型谐振腔的制作方案。通过理论分析得出,由光电探测器散弹噪声引起的陀螺极限灵敏度与谐振腔的直径和品质因数乘积(D×Q)成正比。运用MEMS工艺,制作出直径达1.5 cm、楔角22°的谐振腔;通过控制氧化硅腐蚀时掩膜层的参数,获得了不同楔角的谐振腔,并论述了腐蚀楔角跟掩膜层参数的关系。通过耦合测试,该谐振腔品质因数为2×106,理论上采用上述谐振腔研制的陀螺,其极限灵敏度可达6(°)/h。
Aiming at the problem that it is difficult for the core sensitive unit in the integrated optical gyro to achieve both integration and high sensitivity, a fabrication scheme of a silicon-based wedged wedge-type resonator is proposed. Theoretical analysis shows that the limit sensitivity of the gyroscope caused by the shot noise of the photodetector is proportional to the product of the diameter and the quality factor of the resonator (D × Q). By using MEMS technology, a resonator with a diameter of 1.5 cm and a wedge angle of 22 ° was fabricated. By controlling the parameters of the mask during etching of silicon oxide, different wedge-angle resonators were obtained, and the relationship between the etching wedge angle and the mask layer The relationship between the parameters. Through the coupling test, the resonator has a quality factor of 2 × 106. Theoretically, the gyroscope developed by the above resonator has a limit sensitivity of 6 (°) / h.