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为了满足空间同轴三反相机对大口径凸非球面高精度的面形质量和精确的几何参数控制要求,提出以计算机控制确定性研抛工艺为核心的多工序组合加工及检测技术。在加工阶段,首先利用超声振动磨削技术对非球面进行面形铣磨,其次应用机器人对非球面面形进行快速研磨和粗抛,最后采用离子束修形技术实现非球面的高精度加工;在检测阶段,首先利用三坐标测量机对铣磨和研磨过程中非球面的面形及几何参数进行控制,进入干涉仪测量范围后,再采用Hindle球法对非球面光学参数进行干涉检测。结合工程实例,对一口径520 mm的凸双曲面次镜进行了加工及检测,其面形精度RMS为0.015λ(λ=632.8 nm),几何参数控制精度ΔR误差为0.1 mm、ΔK优于0.1%,满足光学设计技术指标要求。
In order to meet the requirements of high-precision surface geometry and precise geometric parameters control of large-diameter aspheric aspheric surfaces, a multi-process machining and testing technology based on computer controlled determinative polishing technology is proposed. In the processing stage, firstly the surface grinding of the aspherical surface is carried out by using the ultrasonic vibration grinding technology. Secondly, the robot is used to rapidly and coarsely polish the non-spherical surface shape. Finally, the ion beam modification technique is used to realize the high-precision machining of the aspheric surface. In the testing phase, firstly, the surface shape and geometric parameters of aspheric surface during milling and grinding are controlled by CMM. After entering the measurement range of the interferometer, Hindle ball method is used to detect the optical parameters of aspheric surface. With the engineering example, a convex hypoid secondary mirror with a diameter of 520 mm was machined and tested. The surface RMS RMS was 0.015λ (λ = 632.8 nm). The geometric error ΔR was 0.1 mm and the ΔK was better than 0.1 %, To meet the optical design specifications.