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本文概述了现有运行于ＶＡＸ－１１／７５０小型机上的ＪＢＸ－６ＡⅡ型电子束曝光机的数据转换软件的主要功能，在此基础上，提出运行于微机或工作站上的电子束曝光机图形数据格式转换软件的总体设计和流程图
This paper summarizes the main functions of the existing data conversion software of JBX-6AⅡ electron beam lithography machine operating on the VAX-11/750 minicomputer, and on this basis, presents the data of the electron beam lithography machine running on a microcomputer or a workstation The overall design and flow chart of the format conversion software