Three kinds of tetrapod-like ZnO nanostructures have been synthesized simultaneously via pure Zn chemical vapor deposition on silicon wafers with (111) orientation (Si (111)) at 920 ℃.X-ray diffraction indicates that the nanotetrapods are of wurtzite structure. The morphology and the microstructure of the nanotetrapods are investigated by the scanning electron microscopy. Selected area electron diffraction shows the growth direction, and energy dispersive X-ray spectroscopy reveals the atomic composition ratio of Zn/O. The growth process is briefly discussed. The optical property of the products was also recorded by means of photoluminescence spectroscopy.