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提出一种利用十字光栅衍射的多普勒效应进行二维位移测量的新方法。给出了以二维全息光栅为多普勒频移发生器、以矩形槽相位光栅为混频器的光路结构和测量原理。理论计算和实验表明,此系统具有良好的信号质量和较高的测量精确度,奇用于生产环境中的两坐标精密检测。
A new method of two-dimensional displacement measurement using the Doppler effect of cross grating diffraction is proposed. The optical path structure and measuring principle of two-dimensional holographic gratings as Doppler shift generator and rectangular groove phase grating as mixer are given. Theoretical calculations and experiments show that this system has good signal quality and high measurement accuracy, and is especially suitable for the precise detection of two coordinates in a production environment.