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小型制冷机低温泵（以下简称低温泵）是七十年代末发展起来的一种新型抽气设备，目前国外已大量生产并在半导体微电子技术、新型材料科学、光学和装饰类镀膜以及空间模拟和环境试验装置等方面得到了广泛的应用。本文简要介绍了这种泵的工作原理、典型结构、操作方法及主要参数和尺寸的设计计算并给出了抽气速率２００００升／秒低温泵的计算实例、技术特性及经济效果，实践结果表明，同获得相同抽气特性的油扩散泵相比，一年可节约电力 ３０多万度，水 １５０００米~3，最后对发展低温泵提出一些看法。
Small refrigerator cryogenic pump (hereinafter referred to as cryogenic pump) is developed in the late seventies a new type of suction equipment, the current mass production has been abroad and in semiconductor microelectronics technology, new materials science, optical and decorative coatings and space simulation And environmental test equipment has been widely used. This paper briefly introduces the working principle, the typical structure, the operation method, the design and calculation of the main parameters and dimensions of the pump, and gives the calculation examples, technical characteristics and economic effects of cryogenic pump with pumping rate of 20000 l / s, and the practical results show Compared with the oil diffusion pump with the same pumping characteristics, it can save over 300,000 kWh of electricity and 15,000 meters of water a year. Finally, some opinions on the development of cryogenic pumps are put forward.