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室温下采用射频磁控溅射法在有机薄膜-聚丙烯己二酯(polypropyleneadipate,PPA)衬底上制备出了ZnO:Al(AZO)透明导电膜。其它制备参数保持不变的条件下通过改变淀积时间得到厚度不同的薄膜,并对不同厚度AZO薄膜的结构特性、光学特性和电学特性进行了研究。
At room temperature, ZnO: Al (AZO) transparent conductive films were prepared by RF magnetron sputtering on an organic thin film polypropylene (PPA) substrate. The films with different thicknesses were obtained by changing the deposition time under the condition of keeping the other preparation parameters unchanged. The structural, optical and electrical properties of AZO films with different thicknesses were studied.