报道了一种基于飞秒激光加工的微纳高温振动传感器。通过熔接形成单模光纤-空芯光纤-单模光纤的结构,利用单模光纤和空芯光纤在熔接面形成的菲涅尔反射,构成外腔式法布里-珀罗干涉仪(EFPI)。用飞秒激光烧蚀空芯光纤,形成悬臂梁结构。末端的单模光纤作为质量块,在受到振动时带动悬臂梁振动,使悬臂梁产生微弯,进而使EFPI腔长发生变化。实验结果表明,传感器的工作区域为20~300Hz,在100Hz时,0~3.01g范围内测得加速度分辨率为5×10-4 g,加速度响应灵敏度为129.6nm/g。传感器受温度影响小,腔长的温度交叉响应仅为0.225nm/℃,传感器可耐950℃高温冲击。 A micro-nano high temperature vibration sensor based on femtosecond laser processing is reported. The structure of the single-mode fiber-hollow core fiber-single-mode fiber is formed by welding, and the external cavity Fabry-Perot interferometer (EFPI) is formed by using the Fresnel reflection formed by the single- . Femtosecond laser ablation of hollow fiber to form a cantilever structure. The end of the single-mode optical fiber as a mass, when subjected to vibration induced cantilever vibration, the cantilever beam slightly bent, leaving the EFPI cavity length changes. The experimental results show that the working area of ​​the sensor is 20 ~ 300Hz. At 100Hz, the resolution of acceleration is 5 × 10-4 g and the acceleration response sensitivity is 129.6nm / g in the range of 0 ~ 3.01g. The sensor is affected by the temperature is small, the temperature of the cavity length cross response is only 0.225nm / ℃, the sensor can withstand 950 ℃ high temperature impact.