一、液态三氯氧磷和陶瓷片状磷源比较 三氯氧磷在600℃以上将发生如下反应 生成的五氯化磷和氧气与硅在高温下生成二氧化硅和磷原子。 从上面反应可以看出,如果三氯氧磷热分解时,没有外来的氧参与,则分解是不充分的,生成的五氯化磷是不易分解的,并对硅有腐蚀作用,破坏硅的表面状态。但在有外来氧气存在的情况下,五氯化磷会进一步分解成五氧化二磷并放出氯气。 First, the liquid phosphorus oxychloride and ceramic flake phosphorus source phosphorus oxychloride at 600 ℃ above will occur the following reaction of phosphorus pentachloride and oxygen and silicon at high temperature to generate silica and phosphorus atoms. It can be seen from the above reaction that if phosphorus oxychloride is thermally decomposed and no external oxygen is involved, the decomposition is insufficient and the generated phosphorus pentachloride is not easily decomposed and has a corrosive effect on silicon and silicon damage surface condition. However, in the presence of external oxygen, phosphorus pentachloride decomposes further to phosphorus pentoxide and releases chlorine.