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采用溶胶-凝胶法,在氧气氛中和层层晶化的工艺条件下,成功地制备了沉积在Pt/Ti/SiO2/Si(100)衬底上的铁电性能优良的Sr2Bi4Ti5O18(SBTi)薄膜,并研究了SBTi薄膜的微结构、表面形貌、铁电性能和疲劳特性.研究表明:薄膜具有单一的层状钙钛矿结构,且为随机取向;薄膜表面光滑,无裂纹,厚度约为725nm;铁电性能测试显示较饱和、方形的电滞回线,当外电场强度为275kV/cm时,其剩余极化2Pr和矫顽场2Ec分别为24·0μC/cm2和137·8kV/cm;疲劳测试发现薄膜经过4·4×1010次极化反转后,基本没有显示疲劳.
The Sr2Bi4Ti5O18 (SBTi) films with excellent ferroelectric properties deposited on Pt / Ti / SiO2 / Si (100) substrates were successfully prepared by sol-gel method under oxygen atmosphere and layer crystallization conditions. The microstructure, surface morphology, ferroelectric properties and fatigue properties of SBTi films were studied.The results show that the film has a single layered perovskite structure and is randomly oriented, the surface of the film is smooth and crack-free, the thickness is about Is 725nm. The ferroelectricity test shows a more saturated and square hysteresis loop. When the external electric field intensity is 275kV / cm, the remanent polarization 2Pr and the coercive field 2Ec are 24.0μC / cm2 and 137.8kV / cm; Fatigue test found that the film after 4 × 1010 times polarization reversal, the basic did not show fatigue.