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飞秒激光热反射技术已经成为研究不同材料中超快速热传导过程的有效实验方法。实验中采用前表面加热、后表面探测的方法对不同厚度的Au薄膜进行了测量,通过比较表面电子温度可以得到超快速激光加热条件下Au薄膜材料中电子温度振荡的传递速度。结果表明瞬态条件下非平衡态电子是热量的主要载体,根据实验测量值拟合得到的能量传递速度接近于非平衡态电子气热扩散模型中的温度振荡传播速度。瞬态条件下电子气中热量传递规律的深入研究有利于高集成度微电子器件的热优化设计和飞秒激光精密加工技术的发展。
Femtosecond laser heat reflection technology has become an effective experimental method for studying the ultra-fast heat transfer process in different materials. In the experiment, the Au films with different thickness were measured by the methods of front surface heating and back surface detection. The electron temperature oscillation transmission speed in Au thin film material under super-fast laser heating can be obtained by comparing the surface electron temperature. The results show that the non-equilibrium electrons are the main carriers of thermal energy under transient conditions. The energy transfer rate fitted by experimentally measured values is close to the temperature oscillation propagation velocity in the non-equilibrium electron-gas diffusion model. In-depth study of heat transfer in electron gas under transient conditions is in favor of thermal optimization design and development of femtosecond laser precision machining technology for highly integrated microelectronic devices.