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本文通过热力学分析表明,在BCl_3+H_2介质中进行气体渗硼时,气氛中残留的 H_2O,O_2不仅使 BCl_3和 B 原子失去渗硼能力,加大了 BCl_3的消耗,而且加剧了 Fe—Cl 化合物的生成,导致渗层孔洞增加。
Thermodynamic analysis shows that the residual H 2 O and O 2 in the atmosphere not only lose the boron-infiltration ability of BCl 3 and B atoms but also increase the consumption of BCl 3 while gas-boriding BCl 3 + H 2 and exacerbating the Fe-Cl compound Formation, resulting in the infiltration of holes increased.