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利用双光束复合脉冲激光辐照石墨悬浮液沉积技术,制备了高效率、高质量的纳米金刚石薄膜,成功解决了金刚石薄膜沉积不均匀和衬底温度对金刚石薄膜的影响。通过拉曼光谱仪和高分辨率透射电镜对薄膜的微观结构和组成进行了检测分析,实验结果表明,Raman光谱的D峰出现在1334cm-1处,G峰出现在1571cm-1处,沉积的薄膜致密均匀,晶粒平均尺寸在5nm左右。在制备过程中通过复合激光束辅以温度为金刚石薄膜的生长提供了更有利的条件,并在常温常压下连续制备出了粒度分布均匀的纳米金刚石薄膜。
The high-efficiency and high-quality nanodiamond films were prepared by using double-beam composite pulsed laser irradiation of graphite suspension deposition technology. The effects of uneven deposition of diamond films and substrate temperature on the diamond films were successfully solved. The microstructure and composition of the film were analyzed by Raman spectroscopy and high-resolution transmission electron microscopy. The experimental results show that the Raman peak appears at 1334cm-1 and the G peak at 1571cm-1. The deposited film Dense and uniform, the average grain size of about 5nm. In the preparation process by the composite laser beam assisted by the temperature for the growth of the diamond film provides more favorable conditions, and at room temperature and pressure continuously prepared uniform distribution of nano-diamond film.