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基于SU-8光刻胶的高深宽比加工技术,设计了对加速度敏感的悬臂梁-质量块结构。理论推导了加速度与SU-8光刻胶悬臂梁-质量块结构的挠度、法布里-珀罗(F-P)腔的干涉光强之间的关系,得到了简化的计算公式,并讨论了传感器灵敏度和固有频率等主要影响因素。提出了一种新的“卍”形悬臂梁-质量块结构,分析和确定了传感器结构的各项参数。研究结果表明,“卍”形SU-8光刻胶结构能够得到较高的灵敏度,具有良好的检测模态,仿真结果与理论分析吻合,可以基于法布里-珀罗干涉原理实现对加速度的传感。
Based on the high aspect ratio processing technology of SU-8 photoresist, a cantilever-mass structure sensitive to acceleration is designed. The relationship between the acceleration and the deflection of the SU-8 photoresist cantilever-mass structure and the interference light intensity of the Fabry-Perot (FP) cavity is deduced theoretically. A simplified calculation formula is obtained and the relationship between the sensor Sensitivity and natural frequency and other major influencing factors. A new “卍 ” cantilever beam - mass structure is proposed, and the parameters of the sensor structure are analyzed and determined. The results show that the structure of SU-8 photoresist can get higher sensitivity and good detection modalities. The simulation results are in good agreement with the theoretical analysis and can be realized based on the Fabry-Perot interference principle Acceleration sensing.