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本文介绍了真空射频电源使用时阻抗匹配的作用,阻抗自动匹配系统的实现方法,剖析了射频阻抗匹配器结构。在此基础上针对射频阻抗自动匹配目前所采用的算法和技术进行了研究,从控制系统的角度提出了从快速性、稳定性和智能性三方面来提高阻抗匹配的效率和匹配效果。最后对真空射频阻抗自动匹配系统广阔的应用前景进行了总结和展望。
This paper introduces the function of impedance matching when vacuum RF power source is used and the realization method of impedance automatic matching system, and analyzes the structure of RF impedance matching device. Based on this, the present algorithms and techniques for automatic matching of RF impedance are studied. From the perspective of control system, the efficiency and matching effects of impedance matching are improved from three aspects: fastness, stability and intelligence. Finally, the broad application prospect of vacuum RF impedance automatic matching system is summarized and prospected.