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低g值微惯性开关是一种感受惯性加速度、执行开关机械动作的精密惯性装置,其设计目的包括减小体积、提高抗振性和产品间闭合阈值一致性等综合性能。针对一种基于平面矩形螺旋梁的低g值微惯性开关,在给定条件下以增大螺旋梁厚度为目标进行优化建模,运用复合形法的MATLAB语言程序进行优化设计。结果表明,经优化设计后,管芯“弹簧-质量”结构面积为0.09cm2,与初始设计相比减少了约46.5%,满足应用环境的要求。优化模型梁厚度为36.3μm,比初始设计增大了约21%,验证了优化算法的有效性。与传统设计方法相比,复合形法具有较高的实用性和优化效率。为实现对螺旋梁厚度的精确控制,提出了基于双埋层SOI硅片的管芯“弹簧-质量”结构加工工艺方案,并进行了初步的工艺流片。
The low g-value micro-inertia switch is a precision inertial device that measures the inertial acceleration and performs the mechanical action of the switch. The designed low-g-value micro-inertia switch is designed to reduce the volume and improve the vibration resistance and the consistency of closing threshold between products. For a low g-value micro-inertia switch based on a planar rectangular spiral beam, under the given conditions, the goal of increasing the thickness of the spiral beam is to optimize the modeling, and the complex programming method MATLAB language program is used to optimize the design. The results show that after the optimized design, die “spring - mass ” structure area of 0.09cm2, compared with the initial design reduced by about 46.5%, to meet the requirements of the application environment. The optimized model beam thickness is 36.3μm, which is about 21% larger than the initial design, which verifies the effectiveness of the optimization algorithm. Compared with the traditional design method, the complex shape method has high practicability and optimization efficiency. In order to realize accurate control of the thickness of the spiral beam, a die based on double-buried SOI wafers was proposed. The structure of the “spring-mass” structure was processed and a preliminary process flow was performed.