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研制了用于超快激光等离子体诊断的Schwarzschild型正入射显微镜,该显微镜工作波长为18.2 nm,数值孔径为0.1,放大倍数为10。根据诊断要求设计了Schwarzschild物镜的光学结构,计算了物镜的光学传递函数,结果显示,设计的物镜在±1 mm视场范围内像方空间分辨力可达125 lp/mm。根据系统工作波长和光线在镜面的入射角度设计了Mo/Si周期多层膜反射镜,制作了Schwarzschild显微镜光学元件,镀制的膜系周期厚度为9.509 nm,周期数为30,对18.2 nm波长的反射率约31.1%。利用激光等离子体光源对24 lp/mm网格进行了成像实验,实验结果表明:系统在中心视场的分辨力为3μm,600μm内视场的分辨力为5μm。
A Schwarzschild-type normal-incidence microscope for ultrafast laser plasma diagnostics was developed. The microscope operates at a wavelength of 18.2 nm with a numerical aperture of 0.1 and a magnification of 10. The optical structure of the Schwarzschild objective lens was designed according to the diagnostic requirements. The optical transfer function of the objective lens was calculated. The result shows that the designed objective lens has an image-side spatial resolution of 125 lp / mm within ± 1 mm field of view. According to the working wavelength of the system and the incident angle of the light at the mirror, a Mo / Si periodic multilayer mirror was designed and the Schwarzschild microscope optical element was fabricated. The periodic thickness of the film was 9.509 nm and the number of cycles was 30. For the 18.2 nm wavelength The reflectance is about 31.1%. The experiment of 24 lp / mm grid was carried out by laser plasma source. The experimental results show that the resolving power of the system is 3μm in the central field of view and 5μm in the field of 600μm.