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本文利用电感耦合的射频激励产生的氮等离子体对Ti6A14V进行等离子体浸没离子注入．处理结果发现，随射频功率及氮离子注入剂量增加，Ti6A4V表面显微硬度增加；注入能量及剂量对材料摩擦磨损性能有显著影响，而且注入能量不同，最佳注入剂量也相应变化；射频激励下等离子体浸没离子注入具有注入和氮化双重作用．
In this paper, plasma induced ion implantation of Ti6A14V is performed by nitrogen plasma generated by inductively coupled radio frequency excitation. The results showed that the microhardness of Ti6A4V surface increased with the increase of RF power and the dose of nitrogen ion implantation. The energy and dose of injection significantly affected the friction and wear properties of Ti6A4V, and the optimal injection dose varied with different injection energies. Plasma immersion ion implantation has the dual role of injection and nitriding.