Based on important factors that affect soil moisture spatialdistribution, such as the slope gradients, land use, vegetation cover, and surface water diffusion characteristics together with field measurements of soil moisture data obtained from the surface soil under different land use struc-tures, a soil moisture spatial distribution model was established. The diffusion degree coefficient of surface water for different vegetations was estimated from soil moisture values obtained from field measurements. The model can be solved using the finite unit method. The soil moisture spatial distribution on the hill slopes in the Loess Plateau were simulated by the model. A comparison of the simulated values with measurement data shows that the model is a good fit.