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对诸如光盘或者激光打印机这类高精度的光学系统来说,光学系统的波象差的容限要求在λ/15数量级。因此,对系统的波象差测试的需要日益增加。通常测试波象差使用外差干涉仪,干涉方法主要有分束干涉法,(如泰曼干涉仪),以及剪切干涉法。剪切干涉仪的优点是光路简单稳定,调整方便,但数据处理比较困难,而泰曼干涉仪的优点是数据处理简单,但光路复杂,稳定性较差。
For high-precision optical systems such as optical discs or laser printers, the tolerance of the wave aberration of the optical system is required on the order of λ / 15. Therefore, the need for wave aberration testing of the system is increasing. Torsional aberrations are usually measured using heterodyne interferometers. The main methods of interference are the beam-splitting interferometry (eg, the Teijin interferometer), and the shear-interfering method. The advantage of shearing interferometer is that the optical path is simple and stable, easy to adjust, but the data processing is more difficult. The advantage of the interferometer is that the data processing is simple, but the optical path is complex and the stability is poor.