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介绍为光纤光交换器(OXC)设计的表面微机械反射镜的设计、分析与鉴定。这些反射镜由静电微激励器控制,并为光束操纵OXC作了优化。其几何形状决定了它们适于高密度开关矩阵,并且由于在致动机械部分省略了摩擦性的铰链结构,使得这一器件的操作重复性很高。这一反射镜结构的特点之一是最大偏折角可调。它可以通过初始装配调节或更为经典地与标准表面微机械线性激励器联合来进行控制。反射镜使用了商用三层多晶硅表面微机械工艺制作。文中的OXC具有空间和波长可调的优点,特别适用于波分复用(WDM)开关系统。这里制作设计的OXC可用2N个反射镜实现N输入、N输出开关并保持全互连功能。假定额定初始镜转角为25°且入射光垂直于芯片表面,利用这种转镜最多可容纳19路信道。转镜的尺寸为460mm×430mm×1.5mm,用楔阱型静电激励器来激励。转镜的谐振频率为1.31kHz。系统使用衰减系数为0.3的不完全衰减,开关时间为6ms。最大偏折角取决于反射镜的初始偏折角,若初始偏折角为20°,则最大偏折角约为7°。构建了楔阱型微镜静电模型,且实验值与理论值符合得很好。
Describe the design, analysis and identification of surface micromechanical mirrors designed for fiber optic converters (OXC). These mirrors are controlled by an electrostatic microactuator and optimized for beam steering OXC. Their geometry determines their suitability for high-density switching matrices, and the repeatability of this device is high due to the omission of a frictional hinge structure in the actuating mechanical part. One of the hallmarks of this reflector construction is the maximum deflection angle. It can be controlled by initial assembly adjustments or more typically in conjunction with standard surface micromechanical linear actuators. The mirrors were made using a commercial three-layer polysilicon surface micromachining process. The OXC in the article has the advantages of space and wavelength tunable, especially suitable for the WDM switching system. OXC design made here can use 2N mirrors N input, N output switch and maintain full interconnection. Assuming a nominal initial mirror rotation angle of 25 ° and incident light perpendicular to the surface of the chip, a maximum of 19 channels can be accommodated using this mirror. Rotary mirror size 460mm × 430mm × 1.5mm, with a wedge-well type electrostatic exciter to stimulate. The resonant frequency of the mirror is 1.31 kHz. The system uses an attenuation factor of 0.3 imperfect attenuation, switching time of 6ms. The maximum deflection angle depends on the initial deflection angle of the mirror. If the initial deflection angle is 20 °, the maximum deflection angle is about 7 °. An electrostatic model of the wedge-trap micro-mirror was constructed, and the experimental data were in good agreement with the theoretical value.