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为了给航天仪器提供一个长期实时的绝对标准,解决航天仪器测量绝对精度低并且长期稳定性下降的问题,本论文介绍一种采用微机械技术把绝对辐射计微型化的新型绝对辐射计,可把它作为定标基准源引入光谱仪定标系统。其工作原理是利用光电等效性,用电功率标定光功率,采用双测辐射热计精确对称补偿技术,以降低热沉温漂影响,测辐射热计采用金刚石片做衬底,上面采用MEMS技术集成了加热丝、热敏电阻与吸收。对研制出的原理样机进行了性能测试,结果相对于太阳辐照绝对辐射计(Solar Irradiance Absolute Radiometer,SIAR)灵敏度提高3个量级,时间常数缩短8倍,重复性达0.15%。微型化绝对辐射计可作为航天和地面光谱仪的实时绝对定标标准,使仪器的绝对定标精度提高1个量级。
In order to provide aerospace instruments with a long-term real-time absolute standard and to solve the problem of low absolute accuracy and long-term stability of aerospace instruments, this paper presents a new type of absolute radiometer that uses micromechanics to miniaturize an absolute radiometer. It is used as a calibration reference source spectrometer calibration system. Its working principle is the use of photovoltaic equivalence, the use of electrical power calibration of optical power, the use of double measurement bolometer accurate symmetrical compensation technology to reduce the impact of heat sink temperature drift, the bolometer with diamond film to do the substrate above the use of MEMS technology integration The heating wire, thermistor and absorption. The performance of the prototype was tested. The results showed that the sensitivity of SIAR was improved by three orders of magnitude compared with that of SIAR. The time constant was reduced by 8 times and the repeatability was 0.15%. The miniaturized absolute radiometer can be used as a real-time absolute calibration standard for aerospace and terrestrial spectrometers, improving the absolute calibration accuracy of the instrument by one order of magnitude.