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本文介绍了长春光学精密机械研究所研制成功的四台衍射光栅刻划机。该机自1958年开始设计。1号、2号光栅刻划机为机械型,分别于1959年、1965年安装调试完毕。3号、4号光栅刻划机为光电干涉控制型,分别于1970年、1975年制成,每台光栅刻划机都有自己的特点。4号机连续运动时的锁相误差平均为1/100条纹,个别的最大不超过1/36条纹。利用这些类型的光栅刻划机已刻划出许多平面光栅,最大的刻划宽度达185毫米,刻线密度从每毫米60条到1200条。实测分辨本领最高达20万,相对效率最高达90％,一级罗兰鬼线最低为4×10~(-5),赖曼鬼线观察不到。
This article introduced the Changchun Institute of Optics and Precision Mechanics developed four diffraction grating scoring machine. The aircraft design since 1958. No. 1, No. 2 grating scoring machine for the mechanical type, respectively, in 1959, 1965 installation and commissioning completed. No. 3, No. 4 grating sculler for the photoelectric interference control type, respectively, in 1970, made in 1975, each grating engraving machine has its own characteristics. 4 machine continuous movement of the lock-phase error of an average of 1/100 stripe, the individual does not exceed a maximum of 1/36 stripes. Many grating gratings have been scribed using these types of grating scribing machines with a maximum scribe width of 185 mm and a graduation density of 60 to 1200 per mm. The measured resolution of up to 200,000, the relative efficiency of up to 90%, a low-level Roland ghost line 4 × 10 ~ (-5), Lai Man ghost line can not be observed.