本文从物理光学的衍射理论出发,对照明系统如何消除衍射效应进行了理论分析,找出消除衍射效应和高均匀照明场的光学系统结构参数,这个分析已得到了原理实验和工艺模拟实验的证实。这对接近式光刻机复眼透镜照明系统的设计是非常有益的。 Based on the theory of physical optics, this dissertation analyzes theoretically how to eliminate the diffraction effect of the illumination system and finds out the structural parameters of the optical system that can eliminate the diffraction effect and high uniform illumination field. This analysis has been proved by the principle experiment and simulation experiment . This is very beneficial for the design of the proximity lithography machine fly-eye lens illumination system.