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CVD金刚石薄膜刀具的表面粗糙度是影响刀具切削性能的重要参数。为通过改进CVD沉积工艺减小金刚石薄膜表面粗糙度 ,提出了适当提高碳源浓度和合理控制沉积气压两项新的工艺方法 ,并通过切削试验研究了其对金刚石薄膜刀具耐用度及切削性能的影响
The surface roughness of CVD diamond film cutting tool is an important parameter that affects the cutting performance of the tool. In order to reduce the surface roughness of diamond films by improving the CVD deposition process, two new technological methods, such as increasing the carbon source concentration and controlling the deposition pressure, are proposed. The cutting tests are conducted to study the durability and cutting performance of the diamond film cutters influences