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本文以拉曼光谱,PL光谱等表征手段研究准分子激光辐照氧化锌晶格微结构及其光谱性能的影响。当能量密度超过一定阈值时,会造成晶格畸变,诱导产生附加的拉曼振动模式:布里渊区A点的TA模,位于70cm-1左右以及500～600cm-1之间的LO模。准分子激光辐照与未辐照区之间存在晶格畸变逐渐减弱的过渡区。采用共聚焦的方法,Z-向逐点扫描,可以估算一定激光能量密度下,辐照对氧化锌材料的影响区深度。
In this paper, Raman spectroscopy and PL spectroscopy were used to study the effects of excimer laser irradiation on the microstructure and the spectral properties of zinc oxide. When the energy density exceeds a certain threshold, it will cause lattice distortion and induce additional Raman vibration modes: the TA mode at point A in the Brillouin zone, the LO mode located between about 70cm-1 and 500-600cm-1. There is a transition zone between the excimer laser irradiation and the unirradiated zone in which the lattice distortion gradually weakened. Using confocal method, Z-point by point scan, can estimate a certain laser energy density, the impact of irradiation on the zinc oxide material depth.