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Ti 注入钢的射程参数(1～1000keV)是用 TRIM87程序计算而得到的.考虑到高注量注入溅射效应的影响,利用 Schuilz 模型计算了 Ti 注入钢和 Al 中浓度分布.对此模型中饱和注量与离子射程的关系提出了修正.给出了表面浓度与射程关系表示式.为了提高注入效率,节省注入时间,利用这些修正式能方便地给出饱和注量和注入元素浓度分布.计算结果与低温下注入的实验结果相符合,而与加温(400℃)注入的实验结果偏离较大.也考虑了注入合金择优溅射和注入效率的问题.
The range parameters (1 ~ 1000keV) of Ti-infiltrated steel were calculated using the TRIM87 program.Considering the effects of high-fluence injection sputtering effects, the concentration distribution of Ti-infused steel and Al was calculated using the Schuilz model. The relationship between the saturation fluence and the ion projectile is proposed, and the relationship between the surface concentration and the range is given. In order to improve the injection efficiency and save the injection time, the saturation fluence and the concentration distribution of the injected elements can be conveniently given by these corrections. The calculated results are in good agreement with the experimental results at low temperature and deviate from the experimental results at 400 ℃, and the optimal sputtering and injection efficiency are also considered.