在弧放电等离子体离子源中,用支持气体改善离子源的工作已有三十年的历史。美国ORNL在Calutron源中引进N_2或惰性气体。1973年Freeman提出,蒸汽未放电时,先用惰性气体帮助放电,直到蒸汽能建立放电时就停止供气。1977年Hudson等报道了用支持气体提高Ne~(6+)流强。但是,支持气体在弧放电离子源中的作用,至今尚未深入研究, In arc discharge plasma ion sources, support gas has been used to improve ion source work for thirty years. ORNL USA introduces N 2 or inert gas into the Calutron source. In 1973, Freeman suggested that when the steam was not discharged, the inert gas was first used to help discharge the gas until the steam could be discharged. In 1977, Hudson et al. Reported that using support gas to increase the flow rate of Ne ~ (6+). However, the role of gas support in arc discharge ion source has not been studied further,