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本文提出了一种新型的双桥结构压力传感器,两个灵敏度不同的敏感电桥被制作于同一芯片上.通过双桥间的里补,可有效地消除压力传感器的零位和灵敏度温漂,文中给出了具体的算法及相应的实验结果.
In this paper, a new type of double-bridge structure pressure sensor is proposed, in which two sensitive bridges with different sensitivities are fabricated on the same chip, and the zero offset and sensitivity drift of the pressure sensor can be effectively eliminated by means of double compensation. The paper gives the specific algorithm and the corresponding experimental results.