论文部分内容阅读
研究了基于双折射晶体的非“三明治”结构的分区光瞳滤波器在低数值孔径聚焦系统中的光学特性。以内区为玻璃和外区为双折射晶体的两区光瞳滤波器为例,给出了此类光瞳滤波器光瞳函数的精确表达式。结合标量衍射理论,数值模拟了其光学特性。结果表明,通过旋转光瞳滤波器可以实现系统焦平面上横向光学超分辨的连续调节,同时可以扩展焦深。这种滤波器较现有的基于双折射晶体的光瞳滤波器具有更高的光能利用率,并且其可调性更方便于实际应用。
The optical properties of a partitioned pupil filter based on birefringent crystal with non-sandwich structure in a low numerical aperture focusing system are studied. Taking the two-zone pupil filter whose inner zone is birefringent crystal and the outer zone is taken as an example, the exact expression of the pupil function of such pupil filter is given. Combined with scalar diffraction theory, numerical simulation of its optical properties. The results show that by rotating the pupil filter, it is possible to realize continuous adjustment of transverse optical super-resolution on the focal plane of the system and to extend the depth of focus. Compared with the existing birefringent crystal-based pupil filter, this kind of filter has higher light energy utilization rate, and its tunability is more convenient for practical application.