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在有机发光二极管(OLED)器件衬底上制备可传递三维立体微结构可有效消除波导、增加出光耦合,从而增加器件出光效率。纳米压印技术是制备立体微结构的主要方法之一。采用紫外纳米压印技术在OLED衬底上制备三维立体微结构。首先采用电子束光刻(EBL)技术与干法刻蚀相结合的方法来制备高精度的紫外纳米压印模板;然后对模板进行清洗与抗粘连处理;最后采用紫外纳米压印技术在OLED衬底上成功制备了可传递三维立体微结构。制备结果表明,所形成的微结构具有均匀性好和压印精度高的特点。
The preparation of transmissive three-dimensional microstructures on organic light-emitting diode (OLED) device substrates can effectively eliminate the waveguides, increase the optical coupling, and increase the light-emitting efficiency of the device. Nano-imprint technology is one of the main methods to prepare three-dimensional microstructure. Ultraviolet nanoimprint technology was used to fabricate three-dimensional micro-structure on OLED substrate. Firstly, a high-precision UV nanoimprint template was prepared by the combination of electron beam lithography (EBL) and dry etching. Then the template was cleaned and antiblocked. Finally, UV nanoimprint technology The bottom successfully prepared three-dimensional transmissible microstructure. The preparation results show that the microstructures formed have the characteristics of good uniformity and high imprint precision.