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5. Friction and Cutting Properties of Hot-Filament Chemical Vapor Deposition Micro-and Fine-grained Dia

Friction and Cutting Properties of Hot-Filament Chemical Vapor Deposition Micro-and Fine-grained Dia

来源 :上海交通大学学报（英文版） | 被引量 : 0次 | 上传用户：lixiaoliangtony

【作 者】

：

YANG Guo-dong SHEN Bin SUN Fang-hong 

【机 构】

：

School of Mechanical Engineering,Shanghai Jiaotong University,Shanghai 200240,China

【出 处】

：

上海交通大学学报（英文版）

【发表日期】

：

2010年5期

【关键词】

：

silicon nitride hot-filament chemical vapor deposition(HFCVD) friction and wear 

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