论文部分内容阅读
采用直流反应磁控溅射的方式,用AlCr合金靶,在高速钢(M2)上沉积CrAlN涂层。采用扫描电镜、X射线衍射、能谱和纳米压痕仪等分析和测量手段,系统研究了Ar/N2气流比、气压和基片温度等工艺参数对CrAlN涂层结构和性能的影响。研究表明,Ar/N2气流比、气压和基片温度对涂层均有较大的影响,当Ar/N2气流比为1、总气压为0.2 Pa、基片温度为300℃时所得涂层性能最好,最高硬度和弹性模量分别为34.8,434.3 GPa。
DC reactive magnetron sputtering was used to deposit CrAlN coating on high speed steel (M2) with AlCr alloy target. The effects of Ar / N2 gas flow ratio, gas pressure and substrate temperature on the structure and properties of CrAlN coatings were systematically investigated by means of scanning electron microscopy, X-ray diffraction, energy dispersive spectroscopy and nanoindentation. The results show that Ar / N 2 flow ratio, air pressure and substrate temperature have great influence on the coating. When the Ar / N 2 flow ratio is 1, the total pressure is 0.2 Pa and the substrate temperature is 300 ℃, the coating performance The best, the highest hardness and elastic modulus were 34.8,434.3 GPa.