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本文提出并研究了一种新型台阶阵列阴极真空微电子压力传感器。与平面阵列阴极真空微电子压力传感器相比，该传感器在扩展量程和提高灵敏度方面有较大的潜力。作者展示了计算机模拟计算结果和部分实验结果。
This paper presents and studies a new type of step array cathode vacuum microelectronic pressure sensor. Compared with the planar array cathode vacuum microelectronic pressure sensor, the sensor has great potential in expanding the range and increasing the sensitivity. The author shows computer simulation results and some experimental results.