ＣＭＯＳ０．２μｍ电路据日本《ＯＰｌｕｓＥ》杂志１９９３年第１６４期报道，日本电信电话（ＮＴＴ）公司已研制成为实现下一代ＬＳＩ的基本技术——超微细的ＣＭＯＳ电路。在加工技术上，采用可代替紫外线的Ｘ线，现用０．２ｐｍ的工艺水平，已使器件做到小型化，速度... CMOS0.2μm circuit According to Japan’s “OPlusE” magazine No. 164 of 1993 reported that Japan’s telecom telephone (NTT) company has developed into the realization of the next generation of LSI’s basic technology - ultra-fine CMOS circuits. In the processing technology, the use of X-ray can replace the UV, the current 0.2pm process level, the device has been miniaturized, speed ...